Gallium Arsenide
high-frequency electronics, optoelectronics, solar cells, and power electronics
high-frequency electronics, optoelectronics, solar cells, and power electronics
Identifying critical defects in gallium arsenide
Our AI provides solutions
Train a pipeline specific to your defects.
Identify stacking faults and dislocations
Analyzers tuned for precise classification of different defects.
nSpecPRISM
The nSpec PRISM offers a complete solution for compound semiconductor front-end wafer production, from unpolished substrates to epitaxy and device manufacturing.
System highlights
Illumination modesUV & IR illumination
Max wafer size200 mm
Scan resolution0.9 µm/pixel (w/ 5x objective)
Defect types
Dislocations
Detect defect types by shape and provide count, sizes, and locations for all defects such as edge dislocations and screw dislocations.
Lattice mismatch
Easily identify lattice mismatch and thermal stress from a difference in thermal expansion coefficients.
Surface roughness
Surface imperfections can affect the quality of subsequent layers deposited on the wafer.
Precipitates and clusters
Precipitates or clusters of impurities or dopants can sometimes appear as spots or irregularities.