Aluminum Oxide
Insulating substrates
Insulating substrates
Identifying critical defects in aluminum oxide
Golden template
Generate a golden template to compare against scan images. To ignore feature boundaries, fiducial marks, and other regions, a mask is applied to the golden template.
Handling
nSpec offers flexibility and can handle sample sizes ranging from 50 mm to 300 mm wafers.
Recommended Product
nSpecTURBO
The nSpec TURBO is the ideal system for fully automated high volume manufacturing environments.
System highlights
Defect Types
Pinholes
Locate pinholes that can affect device reliability.
Surface roughness
Determine surface roughness or haze to prevent non-uniform surfaces in subsequent processing steps.
Foreign material contamination
Identify small particles from equipment or the environment during processing.
Grow silicon carbide epitaxy on aluminum oxide substrate
Crystalline defects
nSpec can detect stacking faults and other crystalline defects in the bulk of the material.
Dislocations
On etched wafers, detect defect types by shape and provide counts, sizes, and locations for all defects, such as threading edge dislocations and threading screw dislocations.
Micropipes
Accurately detect and classify subtle crystallographic defects virtually covering the full area of the wafer.
Grow gallium nitride epitaxy on aluminum oxide substrate.
Dislocations
On etched wafers, detect defect types by shape and provide counts, sizes, and locations for all defects, such as threading edge dislocations and threading screw dislocations.
V-pit or inverted pyramids
Identify defects that will cause voltage leaks.
Lattice mismatch
Easily identify lattice mismatch and thermal stress from a difference in thermal expansion coefficients.
Foreign material contamination
Identify small particles from equipment or the environment during processing.