Aluminum Oxide

illustrated graphic icon for aluminum oxide

Insulating substrates

Features

Identifying critical defects in aluminum oxide

Golden template

Generate a golden template to compare against scan images. To ignore feature boundaries, fiducial marks, and other regions, a mask is applied to the golden template.

Handling

nSpec offers flexibility and can handle sample sizes ranging from 50 mm to 300 mm wafers.

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nSpecTURBO

The nSpec TURBO is the ideal system for fully automated high volume manufacturing environments.

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Benefits

Defect Types

  • Pinholes

    Locate pinholes that can affect device reliability.

  • Surface roughness

    Determine surface roughness or haze to prevent non-uniform surfaces in subsequent processing steps.

  • Foreign material contamination

    Identify small particles from equipment or the environment during processing.

Epitaxy

Grow silicon carbide epitaxy on aluminum oxide substrate

Crystalline defects

nSpec can detect stacking faults and other crystalline defects in the bulk of the material.

Dislocations

On etched wafers, detect defect types by shape and provide counts, sizes, and locations for all defects, such as threading edge dislocations and threading screw dislocations.

Micropipes

Accurately detect and classify subtle crystallographic defects virtually covering the full area of the wafer.

Epitaxy

Grow gallium nitride epitaxy on aluminum oxide substrate.

Dislocations

On etched wafers, detect defect types by shape and provide counts, sizes, and locations for all defects, such as threading edge dislocations and threading screw dislocations.

V-pit or inverted pyramids

Identify defects that will cause voltage leaks.

Lattice mismatch

Easily identify lattice mismatch and thermal stress from a difference in thermal expansion coefficients.

Foreign material contamination

Identify small particles from equipment or the environment during processing.

Industries

Our solutions are tailored to meet the unique challenges and demands of each sector.

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