Germanium

Power electronics

Train a pipeline specific to your defects.

Analyzers tuned for precise classification of different defects.

The nSpec PS is highly flexible and detects defects in a variety of wafers, substrates, and materials.

LoadingAutomated wafer loading

Max wafer size200 mm

Scan resolution0.9 µm/pixel (w/ 5x objective)

Metal contamination
Identify metal contaminants from processing equipment or handling to prevent degraded device performance.
Surface roughness
Determine surface roughness or haze to prevent non-uniform surfaces in subsequent processing steps.
Lattice mismatch
Classify stacking faults on the atomic plane within the crystal lattice.
Pinholes
Locate pinholes which can affect device reliability.