Epitaxial Wafers

Perform rapid, full-sample defect detection and classification on epitaxial wafers.

Non-destructive defect detection

Detect dislocations, slip line defects, and crack defects without destructive etching methods.

Quickly classify and distinguish between epitaxial and substrate defects using nTelligence.

Export defect data using industry-standard formats.

The nSpec PS is highly flexible and detects defects in a variety of wafers, substrates, and materials.

Max wafer size200 mm

Scan resolution0.9 µm/pixel (w/ 5x objective)

Insights

Insights

Let’s talk about how Nanotronics can transform your manufacturing process.

Having trouble classifying critical defects? Nanotronics can help.