Epitaxial Wafers

Perform rapid, full-sample defect detection and classification on epitaxial wafers.

Benefits

Non-destructive defect detection

Detect dislocations, slip line defects, and crack defects without destructive etching methods.

AI-powered defect classification

Quickly classify and distinguish between epitaxial and substrate defects using nTelligence.

Flexible output formats

Export defect data using industry-standard formats.

Recommended Product

nSpecPS

The nSpec PS is highly flexible and detects defects in a variety of wafers, substrates, and materials.

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Automated optical inspection tool with robotic wafer loader, nSpec PSAutomated optical inspection tool with robotic wafer loader, nSpec PS
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Free sample report

Having trouble classifying critical defects? Nanotronics can help.
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