nSpecPS
The nSpec PS is highly flexible and detects defects on a variety of wafers, substrates, and materials.
Unparalleled automation for optical inspection in production settings
Reduce operational costs
nSpec PS allows operators to identify, classify, and assign causality to defects in order to prevent down-line issues.
Increase production output
Early detection allows manufacturers to produce high yields and scale processes quickly.
Learn how Nanotronics can help your manufacturing
Schedule a personalized demo and walkthrough with one of our product experts.
nSpec has helped solve some mysterious process issues that have been bothering us for years. It is our daily go-to tool for in-line AVI, Process Control, FMA, etc.
Quality Manager
The ideal system for production settings
Flexible software
User-friendly software makes configuring recipes simple. As needs evolve, recipes are easily saved and modified.
Robust hardware
The nSpec PS can manage various sample form factors and uses Nanotronics' custom illuminator to inspect a wide range of materials.
Powered by Nanotronics AI
nTelligence is trained to identify early process defects before scaling to high-volume manufacturing.
Clean environment
Upgrade the nSpec PS to include CleanCube, a modular clean environment that protects components from contaminants.
Find device-killing defects.
System
Weight
363 kg
Dimensions (W x D x H)
236 cm x 157 cm x 194 cm
Min. Vacuum Requirement
-21 in. Hg (-70 kPa)
Power Supply
208—240 VAC, 15A, 50—60 Hz
Optics
Illumination Modes
Brightfield, Darkfield, Automated DIC (Nomarski)
Light Source
White light LED, (other options available)
Objectives
5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x
Objective Turret
5-position, User‑selectable
Stage
Travel, typical
200 mm X and Y direction
Positioning
Linear servo motors with closed‑loop encoders (50 nm resolution)
Repeatability
+/- 0.5 µm
Travel Flatness
30 µm
Centered Load Capacity
2.27 kg
Wafer Loader
Cassette
25 wafers / cassette, single Standard H-Bar
Standard Wafer Sizes
50, 75, 100, 125, 150, and 200 mm
Wafer Alignment
Automatic by notch or flat
Options
Supported Protocols
SECS/GEM
Illumination
Transmitted light with automated polarizer
Filters
12‑position filter wheel
Enclosure
CleanCube
Handling
OCR (frontside or backside), Ergonomic cassette loader, Sample specific fixtures
Machine learning
Offline workstation, nTelligence™
Automate inspection across your R&D and production lines
Automated Optical Inspection (AOI) is one of the most efficient forms of device inspection, but it is typically limited by resolution. Nanotronics AI detection algorithms overcome this and detect defects that would otherwise go unnoticed.
