The nSpec PS is highly flexible and detects defects on a variety of wafers, substrates, and materials.

Isometric view of an nSpec PS, an automated semiconductor loading device, on a black backgroundIsometric view of an nSpec PS, an automated semiconductor loading device, on a black background

Unparalleled automation for optical inspection in production settings

Reduce operational costs

nSpec PS allows operators to identify, classify, and assign causality to defects in order to prevent down-line issues.

Increase production output

Early detection allows manufacturers to produce high yields and scale processes quickly.

Learn how Nanotronics can help your manufacturing

Schedule a personalized demo and walkthrough with one of our product experts.

nSpec has helped solve some mysterious process issues that have been bothering us for years. It is our daily go-to tool for in-line AVI, Process Control, FMA, etc.

Quality Manager


The ideal system for production settings

Flexible software

User-friendly software makes configuring recipes simple. As needs evolve, recipes are easily saved and modified.

Robust hardware

The nSpec PS can manage various sample form factors and uses Nanotronics' custom illuminator to inspect a wide range of materials.

Powered by Nanotronics AI

nTelligence is trained to identify early process defects before scaling to high-volume manufacturing.

Clean environment

Upgrade the nSpec PS to include CleanCube, a modular clean environment that protects components from contaminants.


Find device-killing defects.

illustrated graphic icon for aluminum nitrideillustrated graphic icon for aluminum nitride

Aluminum Nitride

Aluminum nitride is used in applications requiring high frequency and high temperature operation due to its excellent thermal conductivity stability.

illustrated graphic icon for gallium nitrideillustrated graphic icon for gallium nitride

Gallium Nitride

Gallium nitride is utilized in power electronics for its wide bandgap.

illustrated graphic icon for germaniumillustrated graphic icon for germanium


Germanium is used in power electronics for its high electron mobility and compatibility with silicon.

illustrated graphic icon for indium arsenideillustrated graphic icon for indium arsenide

Indium Arsenide

Indium arsenide is used in high-speed transistors due to its low noise characteristics.

Tech Specs
Compare with other nSpec products


  • Weight

    363 kg

  • Dimensions (W x D x H)

    236 cm x 157 cm x 194 cm

  • Min. Vacuum Requirement

    -21 in. Hg (-70 kPa)

  • Power Supply

    208⁠—⁠240 VAC, 15A, 50⁠—⁠60 Hz


  • Illumination Modes

    Brightfield, Darkfield, 
Automated DIC (Nomarski)

  • Light Source

    White light LED, (other options available)

  • Objectives

    5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x

  • Objective Turret

    5-position, User‑selectable


  • Travel, typical

    200 mm X and Y direction

  • Positioning

    Linear servo motors with closed‑loop encoders (50 nm resolution)

  • Repeatability

    +/- 0.5 µm

  • Travel Flatness

    30 µm

  • Centered Load Capacity

    2.27 kg

Wafer Loader

  • Cassette

    25 wafers / cassette, single Standard H-Bar

  • Standard Wafer Sizes

    50, 75, 100, 125, 150, and 200 mm

  • Wafer Alignment

    Automatic by notch or flat


  • Supported Protocols


  • Illumination

    Transmitted light with
automated polarizer

  • Filters

    12‑position filter wheel

  • Enclosure


  • Handling

    OCR (frontside or backside), Ergonomic cassette loader, Sample specific fixtures

  • Machine learning

    Offline workstation, nTelligence™


Automate inspection across your R&D and production lines

Automated Optical Inspection (AOI) is one of the most efficient forms of device inspection, but it is typically limited by resolution. Nanotronics AI detection algorithms overcome this and detect defects that would otherwise go unnoticed.

More nSPEC Products

Explore more of our nSpec units

Contact Us

Get in touch with one of our industry experts.

Let's talk logistics.

Let’s talk about how Nanotronics can transform your manufacturing process.
Contact Us

Free sample report

Having trouble classifying critical defects? Nanotronics can help.
Get Sample Report