Indium Phosphide

illustrated graphic icon for indium phosphide



Identifying critical defects in indium phosphide

Golden template

nSpec generates a golden template to compare against scan images. To ignore feature boundaries, fiducial marks, and other regions, a mask is applied to the golden template.

Surface defects

Analyzers tuned for precise classification of different defects.



The nSpec CPS is the ideal system for high-volume manufacturing environments.

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Automated optical inspection tool for high-volume manufacturing, nSpec CPSAutomated optical inspection tool for high-volume manufacturing, nSpec CPS

Defect types

  • Surface defects

    Surface imperfections can affect the quality of subsequent layers deposited on the wafer.

  • Dislocations

    Detect defect types by shape and provide counts, sizes, and locations for all defects such as edge dislocations and screw dislocations.


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