Indium Phosphide
Optoelectronics
Optoelectronics
Features
Identifying critical defects in indium phosphide
Golden template
nSpec generates a golden template to compare against scan images. To ignore feature boundaries, fiducial marks, and other regions, a mask is applied to the golden template.
Surface defects
Analyzers tuned for precise classification of different defects.
Benefits
nSpecCPS
The nSpec CPS is the ideal system for high-volume manufacturing environments.
System highlights
HandlingSingle- or multi-load ports
Max wafer size650 mm
Scan resolution0.9 µm/pixel (w/ 5x objective)
Benefits
Defect types
Surface defects
Surface imperfections can affect the quality of subsequent layers deposited on the wafer.
Dislocations
Detect defect types by shape and provide counts, sizes, and locations for all defects such as edge dislocations and screw dislocations.
Industries
Our solutions are tailored to meet the unique challenges and demands of each sector.
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