Life Sciences
Detect and classify defects using photoluminescence and fluorescence illumination.
Multiwavelength support
Automatically inspect samples using visible and UV wavelengths.
Sample support
Support for diverse sample types and flexible materials including microfluidics, Lab-on-a-Chip, and medical devices on wafers.
AI-powered defect classification
Quickly classify defects with nTelligence.
nSpecPRISM
The nSpec PRISM is the ideal inspection system for life science applications with UV and IR illumination capabilities.
System highlights
Max wafer size200 mm
Scan resolution0.9 µm/pixel (w/ 5x objective)
Our solutions are tailored to meet the unique challenges and demands of each sector.
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