Photonic Devices
Automated inspection for complex photonic device layouts under high magnification.
Maximize device yield
Optimize device yield calculations with fully customizable parameters, such as region of interest and defect class.
Pixel array inspection
Automatically detect defects in pixel arrays at high magnification.
Handle complex layouts
Handles device layouts with complex structures and unusual sizes with ease.
AI-powered defect classification
Quickly classify defects with nTelligence.
nSpecPS
The nSpec PS is highly flexible and detects defects in a variety of wafers, substrates, and materials.
System highlights
Max wafer size200 mm
Scan resolution0.9 µm/pixel (w/ 5x objective)
Our solutions are tailored to meet the unique challenges and demands of each sector.
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