The nSpec PRISM offers a complete solution for compound semiconductor front-end wafer manufacturing.

nSpec PRISM, a photoluminescent semiconductor inspection devicenSpec PRISM, a photoluminescent semiconductor inspection device

Photoluminescence inspection for front-end wafer manufacturing

Process agnostic

Gather valuable data points throughout production of compound semiconductors from unpolished substrates to epitaxy and device manufacturing.

Advanced illumination

The PRISM system incorporates a variety of illumination wavelengths to image a variety of materials and classify multiple defect types.

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We have been using nSpec systems for the mapping of micropipes and dislocations in SiC wafers. It is a critical tool for our manufacturing process control and for the development of high quality SiC substrates.


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The ideal system for compound semiconductors

Flexible software

User-friendly software makes configuring recipes simple. As needs evolve, recipes are easily saved and modified.

Robust hardware

The nSpec PRISM can manage various sample form factors and uses Nanotronics' custom illuminator to inspect a wide range of materials.

Powered by Nanotronics AI

nTelligence is trained to identify early process defects before scaling to high-volume manufacturing.

Various lighting modalities

The illuminator enables operators to utilize existing imaging modalities while adding UV and IR Illumination to inspection processes.


Find device-killing defects.

illustrated graphic icon for silicon carbideillustrated graphic icon for silicon carbide

Silicon Carbide

Silicon Carbide is used in power electronics for its high thermal conductivity and ability to operate at high temperatures.

illustrated graphic icon for gallium antimonideillustrated graphic icon for gallium antimonide

Gallium Antimonide

Gallium antimonide is used in infrared detectors due to its sensitivity to infrared radiation.

illustrated graphic icon for indium gallium arsenideillustrated graphic icon for indium gallium arsenide

Indium Gallium Arsenide

Indium gallium arsenide is used in power electronics for its high electron mobility.

illustrated graphic icon for silicon dioxideillustrated graphic icon for silicon dioxide

Silicon Dioxide

Silicon dioxide serves as an insulating substrate due to its high dielectric strength and stability.

Tech Specs
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  • Weight

    363 kg

  • Dimensions (W x D x H)

    236 cm x 157 cm x 194 cm

  • Min. Vacuum Requirement

    -21 in. Hg (-70 kPa)

  • Power Supply

    208⁠—⁠240 VAC, 15A, 50⁠—⁠60 Hz


  • Illumination Modes

    Brightfield, Darkfield,
Automated DIC (Nomarski), Ultraviolet Photoluminescence

  • Light Source

    White light LED, Reflected UV LED (other options available)

  • Objectives

    5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x

  • Objective Turret

    5‑position, User‑selectable


  • Travel, typical

    200 mm X and Y directions

  • Positioning

    Linear servo motors with closed‑loop encoders (50 nm resolution)

  • Repeatability

    +/- 0.5 µm

  • Travel Flatness

    30 µm

  • Centered Load Capacity

    2.27 kg


  • Supported Protocols


  • Illumination

    Transmitted light with automated polarizer

  • Filters

    12‑position filter wheel

  • Enclosure

    CleanCube (included)

  • Handling

    OCR (frontside or backside), Ergonomic cassette loader, Sample specific fixtures

  • Machine learning

    Offline workstation, nTelligence™


Automate inspection across your R&D and production lines

Automated Optical Inspection (AOI) is one of the most efficient forms of device inspection, but it is typically limited by resolution. Nanotronics AI detection algorithms overcome this and detect defects that would otherwise go unnoticed.

More nSPEC Products

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