Indium Gallium Arsenide
Power electronics
Power electronics
Identifying critical defects in indium gallium arsenide
Our AI provides solutions
Train a pipeline specific to your defects.
Autofocus
Advanced autofocus algorithms determine an autofocus map to deliver precise results across batches.
nSpecPRISM
The nSpec PRISM offers a complete solution for compound semiconductor front-end wafer production, from unpolished substrates to epitaxy and device manufacturing.
System highlights
Illumination modesUV & IR illumination
Max wafer size200 mm
Scan resolution0.9 µm/pixel (w/ 5x objective)
Defect types
Crystalline defects
nSpec can detect stacking faults and other crystalline defects in the bulk of the material.
Dislocations
Detect defect types by shape and provide counts, sizes, and locations for all defects, such as edge dislocations and screw dislocations.
Surface roughness
Determine surface roughness or haze to prevent non-uniform surfaces in subsequent processing steps.