Indium Arsenide

High speed transistors

Train a pipeline specific to your defects.

Advanced autofocus algorithms determine an autofocus map to deliver precise results across batches.

The nSpec PS is highly flexible and detects defects in a variety of wafers, substrates, and materials.

LoadingAutomated wafer loading

Max Wafer Size200 mm

Scan Resolution0.9 µm/pixel (w/ 5x objective)

Dislocations
Detect defect types by shape and provide counts, sizes, and locations for all defects such as edge dislocations and screw dislocations.
Surface defects
Surface imperfections can affect the quality of subsequent layers deposited on the wafer.
Surface roughness
Determine surface roughness or haze to prevent non-uniform surfaces in subsequent processing steps.