Learn how the nSpec LS can efficiently increase yields and scale processes

Optical inspection tool nSpec LSOptical inspection tool nSpec LS

Accelerate research with advanced inspection

Reduce operational costs

nSpec LS allows operators to identify, classify, and assign causality to defects in order to prevent down-line issues.

Increase production output

Early detection allows manufacturers to produce high yields and scale processes quickly.

Learn how Nanotronics can help your manufacturing

Schedule a personalized demo and walkthrough with one of our product experts.

nSpec was purchased in 2013 and is a workhorse for us. It provides invaluable characterization of the properties of every wafer that goes through our facility.

President & CEO


The ideal system for research & development settings

Defect inspection is crucial to scaling next-generation devices. The LS system has a small footprint and is used to identify, classify, and assign causality to defects before you scale to volume production.

Flexible software

User-friendly software makes configuring recipes simple. As needs evolve, recipes are easily saved and modified.

Robust hardware

The nSpec LS can manage various sample form factors and can inspect a wide variety of new and novel materials.

Powered by Nanotronics AI

nTelligence is trained to identify early process defects before scaling to high-volume manufacturing.

Modular design

Easily upgrade the nSpec LS to a PS system when your process is ready to be scaled to volume production.

close up of custom machined aluminum hardwareclose up of custom machined aluminum hardware

Find device-killing defects.

illustrated graphic icon for silicon carbideillustrated graphic icon for silicon carbide

Silicon Carbide

Silicon Carbide is used in power electronics for its high thermal conductivity and ability to operate at high temperatures.

illustrated graphic icon for glassillustrated graphic icon for glass


Glass serves as substrates for semiconductor devices due to its smooth surface and low cost.

illustrated graphic icon for grapheneillustrated graphic icon for graphene


Graphene is used in flexible electronics due to its exceptional electrical conductivity, mechanical strength and flexibility.

illustrated graphic icon for sapphireillustrated graphic icon for sapphire


Sapphire is utilized in LEDs as a substrate for its transparency, hardness, and thermal conductivity.

Tech Specs
Compare with other nSpec products


  • Weight

    240 kg

  • Dimensions (W x D x H)

    165 cm x 157 cm x 194 cm

  • Min. Vacuum Requirement

    -21 in. Hg (-70 kPa)

  • Power Supply

    208⁠—⁠240 VAC, 15A, 50⁠—⁠60 Hz


  • Illumination Modes

    Brightfield, Darkfield,
Automated DIC (Nomarski)

  • Light Source

    White light LED (other options available)

  • Objectives

    5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x

  • Objective Turret

    5-position, User‑selectable


  • Travel, typical

    200 mm X and Y directions

  • Positioning

    Linear servo motors with closed‑loop encoders (50 nm resolution)

  • Repeatability

    +/- 0.5 µm

  • Travel Flatness

    30 µm

  • Centered Load Capacity

    2.27 kg


  • Supported Protocols


  • Illumination

    Transmitted light with automated polarizer

  • Filters

    12‑position filter wheel

  • Machine learning

    Offline workstation, nTelligence™


Automate inspection across your R&D and production lines.

Automated Optical Inspection (AOI) is one of the most efficient forms of device inspection, but it is typically limited by resolution. Nanotronics AI detection algorithms overcome this and detect defects that would otherwise go unnoticed.


Explore more of our nSpec units

Contact Us

Get in touch with one of our industry experts.

Let's talk logistics.

Let’s talk about how Nanotronics can transform your manufacturing process.
Contact Us

Free sample report

Having trouble classifying critical defects? Nanotronics can help.
Get Sample Report