nSpecES
Learn how the nSpec ES can efficiently increase yields and scale processes
Accelerate university research with AOI
Reduce operational costs
nSpec ES allows students and researchers to identify, classify, and assign causality to defects in order to prevent down-line issues.
Increase production output
Early detection allows universities to produce high yields and scale processes quickly.
Speak with one of our product experts
Schedule a personalized demo and learn how Nanotronics can help your operations.
nSpec was purchased in 2013 and is a workhorse for us. It provides invaluable characterization of the properties of every wafer that goes through our facility.
The ideal system for university settings
The ES system can streamline R&D efforts and optimize process improvement for universities operating in the precision manufacturing space.
Flexible software
User-friendly software makes configuring recipes simple. As needs evolve, recipes are easily saved and modified.
Robust hardware
The nSpec LS can manage various sample form factors and can inspect a wide variety of new and novel materials.
Powered by Nanotronics AI
nTelligence is trained to identify early process defects before scaling to high-volume manufacturing.
Modular design
Easily upgrade the nSpec LS to a PS system when your process is ready to be scaled to volume production.
Find device-killing defects.
System
Weight
240 kg
Dimensions (W x D x H)
165 cm x 157 cm x 194 cm
Min. Vacuum Requirement
-21 in. Hg (-70 kPa)
Power Supply
208—240 VAC, 15A, 50—60 Hz
Optics
Illumination Modes
Brightfield, Darkfield, DIC (Nomarski)
Light Source
White light LED (other options available)
Objectives
5x included
Objective Turret
5-position, User‑selectable
Stage
Travel, typical
200 mm X and Y directions
Positioning
Linear servo motors with closed‑loop encoders (50 nm resolution)
Repeatability
+/- 0.5 µm
Travel Flatness
30 µm
Centered Load Capacity
2.27 kg
Automate inspection across your R&D and production lines.
Automated Optical Inspection (AOI) is one of the most efficient forms of device inspection, but it is typically limited by resolution. Nanotronics AI detection algorithms overcome this and detect defects that would otherwise go unnoticed.