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Patterned Wafers
Perform powerful device inspections on single patterned wafers with complexities ranging from multiple devices to non-repeating device layouts
Benefits
Boost device yield
Find and address defect excursions at every step of the manufacturing process.
Automatic defect detection
Detect subtle defects using golden template-based machine vision methods.
AI-powered defect classification
Quickly classify defects with nTelligence.
Device yield
Maximize device yield calculations with fully customizable parameters like region of interest and defect class.
Recommended Product
nSpecPS
The nSpec PS is highly flexible and detects defects in a variety of wafers, substrates, and materials
System highlights
Max wafer size200 mm
Scan resolution0.9 µm/pixel (w/ 5x objective)
Industries
Our solutions are tailored to meet the unique challenges and demands of each sector.
Resources
More helpful resources from Nanotronics
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