Aluminum Nitride

High frequency & high temperature

nSpec offers flexibility and can handle sample sizes ranging from 50 mm to 300 mm wafers.

Train a pipeline specific to your defects.

The nSpec PS is highly flexible and detects defects in a variety of wafers, substrates, and materials.

LoadingAutomated wafer loading

Max wafer size200 mm

Scan resolution0.9 µm/pixel (w/ 5x objective)

Pitting
Classify and quantify pitting defects that can cover the entirety of a wafer.
Planar and void
AI allows operators to classify defects based on size. Planar and void defects generally occupy less surface area.

Let’s talk about how Nanotronics can transform your manufacturing process.

Having trouble classifying critical defects? Nanotronics can help.