Aluminum Nitride

illustrated graphic icon for aluminum nitride

High frequency & high temperature


Identifying critical defects in aluminum nitride


nSpec offers flexibility and can handle sample sizes ranging from 50 mm to 300 mm wafers.

Our AI provides solutions

Train a pipeline specific to your defects.

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The nSpec PS is highly flexible and detects defects in a variety of wafers, substrates, and materials.

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Automated optical inspection tool with robotic wafer loader, nSpec PSAutomated optical inspection tool with robotic wafer loader, nSpec PS

Defect types

  • Pitting

    Classify and quantify pitting defects that can cover the entirety of a wafer.

  • Planar and void

    AI allows operators to classify defects based on size. Planar and void defects generally occupy less surface area.


Our solutions are tailored to meet the unique challenges and demands of each sector.

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