Gallium Nitride

Power electronics

Train a pipeline specific to your defects.

Analyzers tuned for precise classification of different defects

The nSpec PS is highly flexible and detects defects in a variety of wafers, substrates, and materials.

Loading Automated wafer loading

Max wafer size200 mm

Scan resolution0.9 µm/pixel (w/ 5x objective)

Dislocations
On etched wafers, detect defect types by shape and provide counts, sizes, and locations for all defects, such as threading edge dislocations and threading screw dislocations.
V-pit or inverted pyramids
Identify defects that will cause voltage leaks.
Lattice mismatch
Easily identify lattice mismatch and thermal stress from a difference in thermal expansion coefficients.
Foreign material contamination
Identify small particles from equipment or the environment during processing.