Gallium Nitride

illustrated graphic icon for gallium nitride

Power electronics


Identifying critical defects in gallium nitride

Our AI provides solutions

Train a pipeline specific to your defects.

Identify micropits and basal plane defects

Analyzers tuned for precise classification of different defects

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The nSpec PS is highly flexible and detects defects in a variety of wafers, substrates, and materials.

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Automated optical inspection tool with robotic wafer loader, nSpec PSAutomated optical inspection tool with robotic wafer loader, nSpec PS

Defect types

  • Dislocations

    On etched wafers, detect defect types by shape and provide counts, sizes, and locations for all defects, such as threading edge dislocations and threading screw dislocations.

  • V-pit or inverted pyramids

    Identify defects that will cause voltage leaks.

  • Lattice mismatch

    Easily identify lattice mismatch and thermal stress from a difference in thermal expansion coefficients.

  • Foreign material contamination

    Identify small particles from equipment or the environment during processing.


Our solutions are tailored to meet the unique challenges and demands of each sector.

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