Silicon Dioxide

Insulating substrates

Nanotronics has designed configurations specific for use with substrate, epitaxy, and devices.

Analyzers tuned for precise classification of different defects.

The nSpec PS is highly flexible and detects defects in a variety of wafers, substrates, and materials.

LoadingAutomated wafer loading

Max wafer size200 mm

Scan resolution0.9 µm/pixel (w/ 5x objective)

Stress-induced defects
Easily identify stress defects from a difference in thermal expansion coefficients.
Metal contamination
Identify metal contaminants from processing equipment or handling to prevent degraded device performance.
Bulk defects
nSpec can detect crystalline defects in the bulk of the material.