Silicon Dioxide
Insulating substrates
Insulating substrates
Features
Identifying critical defects in silicon dioxide
Robust hardware
Nanotronics has designed configurations specific for use with substrate, epitaxy, and devices.
Identify micropits and slip lines
Analyzers tuned for precise classification of different defects.
Recommended Product
nSpecPS
The nSpec PS is highly flexible and detects defects in a variety of wafers, substrates, and materials.
System highlights
LoadingAutomated wafer loading
Max wafer size200 mm
Scan resolution0.9 µm/pixel (w/ 5x objective)
Benefits
Defect types
Stress-induced defects
Easily identify stress defects from a difference in thermal expansion coefficients.
Metal contamination
Identify metal contaminants from processing equipment or handling to prevent degraded device performance.
Bulk defects
nSpec can detect crystalline defects in the bulk of the material.
Industries
Our solutions are tailored to meet the unique challenges and demands of each sector.
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