Silicon Dioxide

illustrated graphic icon for silicon dioxide

Insulating substrates


Identifying critical defects in silicon dioxide

Robust hardware

Nanotronics has designed configurations specific for use with substrate, epitaxy, and devices.

Identify micropits and slip lines

Analyzers tuned for precise classification of different defects.

Recommended Product


The nSpec PS is highly flexible and detects defects in a variety of wafers, substrates, and materials.

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Automated optical inspection tool with robotic wafer loader, nSpec PSAutomated optical inspection tool with robotic wafer loader, nSpec PS

Defect types

  • Stress-induced defects

    Easily identify stress defects from a difference in thermal expansion coefficients.

  • Metal contamination

    Identify metal contaminants from processing equipment or handling to prevent degraded device performance.

  • Bulk defects

    nSpec can detect crystalline defects in the bulk of the material.


Our solutions are tailored to meet the unique challenges and demands of each sector.

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