nSpecCPS
The nSpec CPS is the ideal system for high-volume manufacturing environments.
Detect defects on a variety of wafers in high-volume production
High volume production
nSpec CPS allows operators to quickly and efficiently identify defects within volume production.
Robust handling
Scan any sample size with FOUP loadports to keep pace with volume production needs.
Learn how Nanotronics can help your manufacturing
Schedule a personalized demo and walkthrough with one of our product experts.
nSpec's machine learning functionality has given deeper insight into our processes. It guides us to better techniques which have improved our yields and costs significantly.
Anonymous
Co-Founder | Chief Entrepreneur
Find device-killing defects.
System
Weight
1180 kg
Dimensions (W x D x H)
240 cm x 194 cm x 262 cm
Min. Vacuum Requirement
-21 in. Hg (-70 kPa)
Power Supply
208—240 VAC, 15A, 50—60 Hz
Min. Clean Dry Air
60 PSI (415 kPa)
Optics
Illumination Modes
Brightfield, Darkfield, Automated DIC (Nomarski)
Light Source
White light LED (other options available)
Objectives
5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x
Objective Turret
5‑position, User‑selectable
Stage
Travel, typical
350 mm X and Y directions
Positioning
Linear servo motors with closed‑loop encoders (50 nm resolution)
Repeatability
+/- 2 µm
Travel Flatness
20 µm
Centered Load Capacity
5 kg
Options
Supported Protocols
SECS/GEM, E-84 Interface
Illumination
Transmitted light with automated polarizer
Filters
12‑position filter wheel
Enclosure
CleanCube, Air Ionizers, Light Curtains
Handling
OCR (frontside or backside), Ergonomic cassette loader, Sample specific fixtures
Load Port
N2 Purge Load Port, 200 mm cassette adapter for Load Port
Machine learning
Offline workstation, nTelligence™
Automate inspection across your R&D and production lines
Automated Optical Inspection (AOI) is one of the most efficient forms of device inspection, but it is typically limited by resolution. Nanotronics AI detection algorithms overcome this and detect defects that would otherwise go unnoticed.
