nSpecTURBO
The nSpec TURBO is the ideal system for fully automated high volume manufacturing environments.
Larger efficiency gains when scanning large format samples
Flexible handling
nSpec TURBO can be built with different configurations to accommodate multiple handling ports and a variety of sample sizes.
Reduce operational costs
nSpec TURBO allows operators to identify, classify, and assign causality to defects in order to prevent down-line issues.
Learn how Nanotronics can help your manufacturing
Schedule a personalized demo and walkthrough with one of our product experts.
nSpec satisfies a capability need for capturing high-resolution optical photos of wafers at intermediate stages of semiconductor process. nSpec is a versatile and dependable tool that can handle over one-hundred products.
Anonymous
Quality Scientist
Fit your footprint
nSpec TURBO is available in two sizes to speed up quality control on production lines for 300mm sample sizes up to 650mm.
Find device-killing defects.
System
Weight
1200 kg
Dimensions (W x D x H)
240 cm x 194 cm x 262 cm
Min. Vacuum Requirement
-21 in. Hg (-70 kPa)
Power Supply
208—240 VAC, 15A, 50—60 Hz
Min. Clean Dry Air
60 PSI (415 kPa)
Optics
Illumination Modes
Brightfield, Darkfield, Automated DIC (Nomarski)
Light Source
White light LED (other options available)
Objectives
5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x
Objective Turret
5‑position, User‑selectable
Stage
Travel, typical
350 mm X and Y directions
Positioning
Linear servo motors with closed‑loop encoders (50 nm resolution)
Repeatability
+/- 2 µm
Travel Flatness
20 µm
Centered Load Capacity
12.5 kg
Options
Supported Protocols
SECS/GEM, E-84 Interface
Illumination
Transmitted light with automated polarizer
Filters
12‑position filter wheel
Enclosure
CleanCube, Light Curtains
Handling
OCR (frontside or backside), Ergonomic cassette loader, Sample specific fixtures
Load Port
N2 Purge Load Port, 200 mm cassette adapter for Load Port
Machine learning
Offline workstation, nTelligence™
Automate inspection across your R&D and production lines
Automated Optical Inspection (AOI) is one of the most efficient forms of device inspection, but it is typically limited by resolution. Nanotronics AI detection algorithms overcome this and detect defects that would otherwise go unnoticed.