nSpecLS Air
Learn how the nSpec LS Air can increase yields and scale processes with unmatched efficiency.
Accelerate research with advanced inspection
Reduce operational costs
nSpec LS allows operators to identify, classify, and assign causality to defects in order to prevent down-line issues.
Increase production output
Earlier detection allows manufacturers to produce high yields and scale processes quickly.
Learn how Nanotronics can help your manufacturing
Schedule a personalized demo and walkthrough with one of our product experts.
nSpec was purchased in 2013 and is a workhorse for us. It provides invaluable characterization of the properties of every wafer that goes through our facility.
Anonymous
President & CEO
The ideal system for research & development settings
Defect inspection is crucial to scaling next-generation devices. The LS Air system has a small footprint and is used to identify, classify, and define causality to defects before you scale to volume production.
Flexible software
User-friendly software makes configuring recipes simple. As needs evolve, recipes are easily saved and modified.
Robust hardware
The nSpec LS Air can manage various sample form-factors, and can inspect a wide variety of new and novel materials.
Powered by Nanotronics AI
The nSpec LS AIR includes Nanotronics proprietary GEN V Artificial Intelligence Software, nTelligence.
Modular design
Easily upgrade the nSpec LS Air to a PS Air system when your process is ready to be scaled to volume production.
Find device-killing defects.
System
Weight
240 kg
Dimensions (W x D x H)
165 cm x 157 cm x 194 cm
Min. Vacuum Requirement
-21 in. Hg (-70 kPa)
Power Supply
208—240 VAC, 15A, 50—60 Hz
Optics
Illumination Modes
Brightfield, Darkfield, Automated DIC (Nomarski)
Light Source
White light LED (other options available)
Objectives
5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x
Objective Turret
5-position, User‑selectable
Stage
Travel, typical
200 mm X and Y directions
Positioning
Linear servo motors with closed‑loop encoders (50 nm resolution)
Repeatability
+/- 0.5 µm
Travel Flatness
30 µm
Centered Load Capacity
2.27 kg
Options
Supported Protocols
SECS/GEM
Illumination
Transmitted light with automated polarizer
Filters
12‑position filter wheel
Machine learning
Offline workstation, nTelligence™
Automate inspection across your R&D and production lines
Automated Optical Inspection (AOI) is one of the most efficient forms of device inspection, but it is typically limited by resolution. Nanotronics AI detection algorithms overcome this and detect defects that would otherwise go unnoticed.
