Learn how the nSpec LS Air can increase yields and scale processes with unmatched efficiency.

Optical inspection tool nSpec LS AirOptical inspection tool nSpec LS Air

Accelerate research with advanced inspection

Reduce operational costs

nSpec LS allows operators to identify, classify, and assign causality to defects in order to prevent down-line issues.

Increase production output

Earlier detection allows manufacturers to produce high yields and scale processes quickly.

Learn how Nanotronics can help your manufacturing

Schedule a personalized demo and walkthrough with one of our product experts.

nSpec was purchased in 2013 and is a workhorse for us. It provides invaluable characterization of the properties of every wafer that goes through our facility.


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The ideal system for research & development settings

Defect inspection is crucial to scaling next-generation devices. The LS Air system has a small footprint and is used to identify, classify, and define causality to defects before you scale to volume production.

Flexible software

User-friendly software makes configuring recipes simple. As needs evolve, recipes are easily saved and modified.

Robust hardware

The nSpec LS Air can manage various sample form-factors, and can inspect a wide variety of new and novel materials.

Powered by Nanotronics AI

The nSpec LS AIR includes Nanotronics proprietary GEN V Artificial Intelligence Software, nTelligence.

Modular design

Easily upgrade the nSpec LS Air to a PS Air system when your process is ready to be scaled to volume production.

Isometric close up view of an nSpec LS, showing the tabletop and stage well litIsometric close up view of an nSpec LS, showing the tabletop and stage well lit

Find device-killing defects.

illustrated graphic icon for copperillustrated graphic icon for copper


Copper is used in interconnects due to its high electrical conductivity and low resistivity.

illustrated graphic icon for glassillustrated graphic icon for glass


Glass serves as substrates for semiconductor devices due to its smooth surface and low cost.

illustrated graphic icon for grapheneillustrated graphic icon for graphene


Graphene is used in flexible electronics due to its exceptional electrical conductivity, mechanical strength and flexibility.

illustrated graphic icon for sapphireillustrated graphic icon for sapphire


Sapphire is utilized in LEDs as a substrate for its transparency, hardness, and thermal conductivity.

Tech Specs
Compare with other nSpec products


  • Weight

    240 kg

  • Dimensions (W x D x H)

    165 cm x 157 cm x 194 cm

  • Min. Vacuum Requirement

    -21 in. Hg (-70 kPa)

  • Power Supply

    208⁠—⁠240 VAC, 15A, 50⁠—⁠60 Hz


  • Illumination Modes

    Brightfield, Darkfield, Manual DIC (Nomarski)

  • Light Source

    White light LED

  • Objectives

    5x (included)

  • Objective Turret

    5-position, User‑selectable


  • Travel, typical

    200 mm X and Y directions

  • Positioning

    Linear servo motors with closed‑loop encoders (50 nm resolution)

  • Repeatability

    +/- 0.5 µm

  • Travel Flatness

    30 µm

  • Centered Load Capacity

    2.27 kg


  • Machine learning

    Offline workstation, nTelligence™


Automate inspection across your R&D and production lines

Automated Optical Inspection (AOI) is one of the most efficient forms of device inspection, but it is typically limited by resolution. Nanotronics AI detection algorithms overcome this and detect defects that would otherwise go unnoticed.


Explore more of our nSpec units

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